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32. Z. Hao, A. Erbil, F. Ayazi, An analytical model for support loss in micromachined beam resonators, Sensors and Actuators A, Vol. 109: pp. 156–164, 2003. 33. J. Yang, T. Ono, M. Esashi, Energy dissipation in submicrometer thick single crystal silicon cantilevers, J. Micromech. Systems, Vol. 11, No. 6: pp. 775–783, 2002. 34. Fluid Mechanics, L. Landau, E. Liftshitz, Pergammon Press, 1959. 35. W. Newell, Miniaturisation of tuning forks, Science, Vol. 161: pp. 1320–1326, 1968. 36. A. P. Wenger, Vibrating fluid densimeters: a solution to the viscosity problem, IEEE Trans on Industrial Electronics and Control Instrumentation, IECI-27 (3): pp.

V. Ferrari, A. Ghisla, D. Marioloi and A. Taroni, Silicon resonant accelerometer with electronic compensation of inputoutput cross-talk, Sensors and Actuators A Vol. 123-124: pp. 258–266, 2005. 50. -C. Nguyen and Roger T. Howe, An Integrated CMOS Micromechanical Resonator High-Q Oscillator, IEEE Journal of Solid State Electronics, 34 (4): pp. 440–455, 1999. 51. R. Ruby, J. Larson, C. Feng and S. Fazzio, The effect of perimeter geometry on FBAR resonator electrical performance, IEEE MTT-S International Microwave Symposium, Vols 1-4: pp 217–220, 2005.

C. Nguyen and Roger T. Howe, An Integrated CMOS Micromechanical Resonator High-Q Oscillator, IEEE Journal of Solid State Electronics, 34 (4): pp. 440–455, 1999. 51. R. Ruby, J. Larson, C. Feng and S. Fazzio, The effect of perimeter geometry on FBAR resonator electrical performance, IEEE MTT-S International Microwave Symposium, Vols 1-4: pp 217–220, 2005. 52. W. Kun, W. -C. Nguyen, VHF free-free beam high-Q micromechanical resonators, IEEE J Microelectromechanical Systems, Vol. 9 (3): pp, 347–360, 2000.

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35.Microelectromechanical Systems by John G. Webster (Editor)


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